Positive, chemically-amplified aromatic methacrylate resist employing the tetrahydropyranyl protecting group
- 1 November 1991
- journal article
- Published by American Chemical Society (ACS) in Chemistry of Materials
- Vol. 3 (6) , 1031-1040
- https://doi.org/10.1021/cm00018a017
Abstract
No abstract availableThis publication has 0 references indexed in Scilit: