Elementary processes in plasma-surface interactions with emphasis on ions
- 1 January 1985
- journal article
- Published by Walter de Gruyter GmbH
- Vol. 57 (9) , 1253-1264
- https://doi.org/10.1351/pac198557091253
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Elementary processes at solid surfaces immersed in low pressure plasmasPublished by Springer Nature ,2006
- Sputtering yield measurementsPublished by Springer Nature ,1981