Double probe model of radio frequency capacitively coupled planar discharges
- 24 March 1986
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 48 (12) , 762-763
- https://doi.org/10.1063/1.96713
Abstract
A simple model, using a quasi-stationary, asymmetric, double probe theory, is presented to describe radio frequency planar glow discharge with a capacitively coupled excitation electrode. It reasonably agrees with available experimental results at frequencies lower than the ionic plasma frequency.Keywords
This publication has 2 references indexed in Scilit:
- Frequency dependence of ion bombardment of grounded surfaces in rf argon glow discharges in a planar systemJournal of Applied Physics, 1985
- Notes on the Effect of Noise on Langmuir Probe CharacteristicsProceedings of the Physical Society, 1962