Crystallinity and hardness of B+-implanted Fe
- 2 May 1988
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 52 (18) , 1469-1471
- https://doi.org/10.1063/1.99101
Abstract
Pure Fe is implanted with B+ at a target temperature range of −20 to 300 °C. The effects of the target temperature on the crystallinity and hardness in the B+ ‐implanted Fe are investigated. It was found that Fe2B is formed by using direct B+ implantation into pure Fe without subsequent annealing. ‘‘Cold implantation,’’ where the implantation is performed at a lower target temperature, reduces crystallinity and increases the hardness of the B+ ‐implanted Fe. An increase in target temperature, therefore, renders the B+ ‐implanted Fe with high crystallinity and relatively low hardness.Keywords
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