A study of deposited charge from electron beam lithography

• 1 November 1990
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B
• Vol. 8  (6) , 1786-1788
• https://doi.org/10.1116/1.585159

Abstract

Keywords

• DEPOSITED CHARGE
• STUDY OF DEPOSITED
• ELECTRON BEAM LITHOGRAPHY