Oxidation Characteristics of Nitrogen Implanted Silicon

• 1 February 1976
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 15  (2) , 389-390
• https://doi.org/10.1143/jjap.15.389

Abstract

Keywords

• OXIDATION CHARACTERISTICS
• CHARACTERISTICS OF NITROGEN
• NITROGEN IMPLANTED SILICON