Thin-film temperature sensors deposited by radio frequency cathodic sputtering

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Abstract
In order to gain better knowledge on the heat exchanges occurring in the turbines of aircraft motors, ONERA is presently developing thin-film heat sensors capable of operating up to a maximum temperature of 1100 °C. These high-temperature sensors are surface thermometers and fluxmeters of the gradient type. They consist of metal films forming thermocouples and insulating films such as alumina or zircon stabilized by yttrium oxide. These layers are deposited by radio frequency cathodic sputtering on substrates such as IN100, DS200, and CMXS2 superalloys which are either aluminized or coated with a NiCoCrAlY alloy. The present state of development of the thermometers is described herein as well as the first results obtained.

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