Use of Ta-Container for Sublimation Growth and Doping of SiC Bulk Crystals and Epitaxial Layers
- 1 July 1997
- journal article
- Published by Wiley in Physica Status Solidi (b)
- Vol. 202 (1) , 177-200
- https://doi.org/10.1002/1521-3951(199707)202:1<177::aid-pssb177>3.0.co;2-i
Abstract
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