Lateral field-emission devices with subtenth-micron emitter to anode spacing

• 1 March 1993
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 11  (2) , 464-467
• https://doi.org/10.1116/1.586841

Abstract

Keywords

• LATERAL FIELD
• SUBTENTH MICRON
• ANODE SPACING
• EMITTER
• FIELD EMISSION DEVICES