Etching of GaAs for patterning by irradiation with an electron beam and Cl2 molecules

• 1 November 1989
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B
• Vol. 7  (6) , 1471-1474
• https://doi.org/10.1116/1.584514

Abstract

Keywords

• ELECTRON BEAM