Radiation thermometry of silicon wafers in a diffusion furnace for fabrication of LSI
- 1 January 1991
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Semiconductor Manufacturing
- Vol. 4 (1) , 59-63
- https://doi.org/10.1109/66.75853
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Estimation of Emissivity and Temperature by Use of Modulated RadiatorTransactions of the Society of Instrument and Control Engineers, 1983
- Spectral Emissivity of SiliconJapanese Journal of Applied Physics, 1967