Applications of microfabrication technology to x-ray laser cavities

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Abstract
We have fabricated new, efficient x-ray optical components (x-ray mirrors, beamsplitters, and highly dispersive multilayer mirrors) and have used them to build an x-ray laser cavity. With our laser cavity, we have demonstrated multipass amplification of soft x rays with significant enhancement (>20×) of the x-ray laser emission. This is an important first step in the ultimate conversion of x-ray amplifier media into true x-ray lasers with optimized coherence and divergence properties. We used advanced microfabrication techniques to fabricate the key laser cavity components which require precise layering of alternating materials, thin-film membrane technology, and precise patterning. The x-ray laser requirements, fabrication details, and characterization results for these cavity components are discussed.

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