Effect of Bottom Oxide on the Integrity of Interpolysilicon Ultrathin ONO (Oxide/Nitride/Oxide) Films
- 1 February 1990
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 137 (2) , 635-638
- https://doi.org/10.1149/1.2086521
Abstract
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