Micromachined sensors for static and dynamic shear-stress measurements in aerodynamic flows
- 22 November 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
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- A wafer-bonded floating-element shear stress microsensor with optical position sensing by photodiodesJournal of Microelectromechanical Systems, 1996
- Integrated flow friction sensorSensors and Actuators, 1988
- Design and calibration of a microfabricated floating-element shear-stress sensorIEEE Transactions on Electron Devices, 1988