Ion Beam Analysis
- 1 December 1984
- journal article
- Published by IOP Publishing in Physics Bulletin
- Vol. 35 (12) , 511-514
- https://doi.org/10.1088/0031-9112/35/12/022
Abstract
The analysis of materials on microscopic and macroscopic scales is important in both research and industry. During electronic device fabrication, for example, the presence of impurities or crystal defects can drastically affect the desired properties of the product.Keywords
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