Characterisation of the fatigued state of ferroelectric PZT thin-film capacitors

• 1 December 1995
• journal article
• Published by Elsevier in Microelectronic Engineering
• Vol. 29  (1-4) , 145-148
• https://doi.org/10.1016/0167-9317(95)00133-6

Abstract

Keywords

• HYSTERESIS LOOP
• THIN FILM
• LOW VOLTAGE