A simple dC/dV measurement method and its applications
- 31 March 1970
- journal article
- Published by Elsevier in Solid-State Electronics
- Vol. 13 (3) , 347-353
- https://doi.org/10.1016/0038-1101(70)90185-1
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- On the Measurement of Impurity Atom Distributions by the Differential Capacitance Technique [Letter to the Editor]IBM Journal of Research and Development, 1969
- An automatic test set for measuring dopant concentration profiles in epitaxial filmsSolid-State Electronics, 1969
- Transient response of an operational amplifier with logarithmic feedbackProceedings of the IEEE, 1969
- On the Measurement of Impurity Atom Distributions in Silicon by the Differential Capacitance TechniqueIBM Journal of Research and Development, 1968
- Impurity Distribution in Epitaxial Silicon FilmsJournal of the Electrochemical Society, 1962