Regrowth Behavior of Three Different Damage Structures in P+ Implanted and Subsequently Laser Annealed Si
Open Access
- 1 July 1980
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 127 (7) , 1589-1591
- https://doi.org/10.1149/1.2129957
Abstract
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