TiC and TiN coatings formed on Si3N4TiC composite ceramics by chemical vapour deposition
- 1 November 1988
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 165 (1) , 149-161
- https://doi.org/10.1016/0040-6090(88)90686-4
Abstract
No abstract availableKeywords
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