AlN films for SAW sensors
- 31 August 1991
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 28 (3) , 203-206
- https://doi.org/10.1016/0924-4247(91)85008-c
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- AlN thin films with controlled crystallographic orientations and their microstructureJournal of Vacuum Science & Technology A, 1987
- Zero-Temperature-Coefficient SAW Devices on AlN Epitaxial FilmsIEEE Transactions on Sonics and Ultrasonics, 1985
- Zinc Oxide Films for Acoustoelectric Device ApplicationsIEEE Transactions on Sonics and Ultrasonics, 1985
- Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatingsJournal of Vacuum Science and Technology, 1974