Ion and neutral atomic and cluster sputtering yields of molybdenum

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Abstract
The yield of neutral and ionized Mo,Mo2, and Mo3sputtered from a Mo target by 4‐keV Ar+ has been measured in the surfaceanalysis by resonance ionization of sputtered atoms (SARISA) machine. Ionization spectroscopy combined with time‐of‐flight (TOF) secondary ion mass spectrometry(SIMS) allowed us to obtain for the first time absolute sputtering yields and ionization fractions of sputtered atoms and metal clusters. Unlike sputtered atomic species, Moclusters have been found to be sputtered with large ion fractions. The sputtering yield of Moclusters is very sensitive to oxygen on the surface, i.e., even small amounts of oxygen on the surface identified by Mo+ and MoO+ peaks in the SIMS spectrum, reduce the cluster yield substantially. A broad structureless absorption band was observed for sputteredMo2 molecules indicating substantial rovibronic excitation as predicted by theoretical models.

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