An Inertial-Grade, Micromachined Vibrating Beam Accelerometer
- 24 August 2005
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 2, 656-658
- https://doi.org/10.1109/sensor.1995.721917
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- A miniature high-sensitivity broad-band accelerometer based on electron tunneling transducersSensors and Actuators A: Physical, 1994
- The effect of thermoelastic internal friction on the Q of micromachined silicon resonatorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1990