Tunneling Acoustic Microscope
- 1 December 1989
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 28 (12A) , L2279
- https://doi.org/10.1143/jjap.28.l2279
Abstract
A tunneling acoustic microscope is a new type of microscope which is based on both a scanning tunneling microscope and a technique for detecting acoustic waves. It enables simultaneous detection of force interactions between tip and sample and tunneling current. Using this new microscope, defects on silicon surface induced by thermal oxidation have been observed by detecting changes in surface conductivity with high spatial resolutions.Keywords
This publication has 4 references indexed in Scilit:
- Tunneling acoustic microscopeApplied Physics Letters, 1989
- TEM Observation of Defects Induced by Cu Contamination on Si(100) SurfaceJapanese Journal of Applied Physics, 1988
- Time-Dependent Dielectric Breakdown of Thin Thermally Grown SiO/sub 2/ FilmsIEEE Journal of Solid-State Circuits, 1985
- Surface Studies by Scanning Tunneling MicroscopyPhysical Review Letters, 1982