Direct bonding of quartz crystal onto silicon
- 1 October 1993
- journal article
- conference paper
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 74 (7) , 4801-4802
- https://doi.org/10.1063/1.354328
Abstract
A new method to bond a quartz crystal onto a silicon substrate, fabricating a quartz-crystal-on-silicon resonator, is reported together with its fabrication process, interface microstructure, and resonant characteristics. A one-chip quartz crystal oscillator employing the quartz-crystal-on-silicon resonator for mobile communication is also suggested.This publication has 6 references indexed in Scilit:
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