Microlithographic techniques for laser assisted fabrication of bioelectronic devices
- 18 November 1996
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 69 (21) , 3280-3282
- https://doi.org/10.1063/1.117310
Abstract
Microlithographic techniques are described for the fabrication of removable stencils to be used in micropatterning by laser deposition of organic and biological matter. Patterned layers are shown together with same atomic force microscope preliminary characterization. Also, a lithographically fabricated micron size glucose biosenser is shown, together with first assays of its performance.Keywords
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