High spatial resolution thermal conductivity of lateral epitaxial overgrown GaN/sapphire (0001) using a scanning thermal microscope
- 30 August 1999
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 75 (9) , 1240-1242
- https://doi.org/10.1063/1.124654
Abstract
We have performed high spatial resolutionthermal conductivity (κ) measurements at room temperature on different patterned sections of GaN/sapphire (0001) fabricated by lateral epitaxial overgrowth using a scanning thermal microscope. In a number of regions we find κ≈1.7–1.8 W/cm K , values that are substantially higher than κ≈1.3 W/cm K previously reported by Sichel and Pankove [J. Phys. Chem. Solids 38, 330 (1977)] on “bulk” material and comparable to the theoretical estimate of 1.7 W/cm K deduced by Slack [J. Phys. Chem. Solids 34, 321 (1973)]. The implications of these findings for device applications will be discussed.Keywords
This publication has 10 references indexed in Scilit:
- Nonmetallic crystals with high thermal conductivityPublished by Elsevier ,2004
- Reduced thermal conductivity in low-temperature-grown GaAsApplied Physics Letters, 1999
- A GaN/4H-SiC heterojunction bipolar transistor with operation up to 300°CMRS Internet Journal of Nitride Semiconductor Research, 1999
- Determination of the thermal conductivity of diamond-like nanocomposite films using a scanning thermal microscopeApplied Physics Letters, 1998
- Atomic force microscopy observation of threading dislocation density reduction in lateral epitaxial overgrowth of gallium nitride by MOCVDMRS Internet Journal of Nitride Semiconductor Research, 1998
- Blue-Green Light-Emitting Diodes and Violet Laser DiodesMRS Bulletin, 1997
- GaN/AIGaN Heterostructure Devices: Photodetectors and Field-Effect TransistorsMRS Bulletin, 1997
- Improved apparatus for picosecond pump-and-probe optical measurementsReview of Scientific Instruments, 1996
- Thermal conductivity of thin SiO2 filmsThin Solid Films, 1992
- Thermal conductivity of GaN, 25–360 KJournal of Physics and Chemistry of Solids, 1977