Combined Gas Microflowmeter and Potentiometric Sensor
- 1 September 1995
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 34 (9R)
- https://doi.org/10.1143/jjap.34.5054
Abstract
A gas microflowmeter based on a potentiometric chemical sensor is demonstrated. The flowmeter operates on the hot-wire principle. Electric current is passed through a platinum microbridge. A preset bridge resistance is kept constant by regulating the heating current. By measuring the changes in the heating current, the calibration flow curve can be obtained. The temperature profiles of both the electrically heated microbridge and the substrate in its vicinity, measured with an infrared microscope, are presented.Keywords
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