Nitrogen redistribution in SiO2 under ion bombardment

• 1 January 1994
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 12  (1) , 205-208
• https://doi.org/10.1116/1.587183

Abstract

Keywords

• ION BOMBARDMENT
• SIO2 UNDER ION
• NITROGEN REDISTRIBUTION IN SIO2