X-ray photoelectron spectroscopy peak shape analysis for the extraction of in-depth composition information

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Abstract
The idea of extracting in-depth composition information through an analysis of the x-ray photoelectron spectroscopy (XPS) peak shape was investigated. The peak shape is described by a single parameter D which is the ratio of the peak area to the increase in background signal 30 eV below the peak energy. Based on a first-order calculation, analytic expressions for D were found for homogeneous solids as well as for the situation where impurities are located at a certain depth underneath the solid surface. An evaluation which includes all inelastic scattering events showed that for an exact treatment, higher-order terms are important. Therefore an empirical formula based on a calculation to infinite order gives a more general description. In experimental XPS one has to deal with the problem of background subtraction. This problem was discussed and an approximate description was suggested.

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