The effect of sample rotation on sputtering induced topography on Si
- 1 January 1985
- journal article
- research article
- Published by Taylor & Francis in Radiation Effects
- Vol. 87 (5) , 241-249
- https://doi.org/10.1080/01422448608209727
Abstract
(1985). The effect of sample rotation on sputtering induced topography on Si. Radiation Effects: Vol. 87, No. 5, pp. 241-249.Keywords
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