Plasma enhanced chemical vapor deposition modeling

• 10 December 1991
• journal article
• Published by Elsevier in Surface and Coatings Technology
• Vol. 49  (1) , 387-393
• https://doi.org/10.1016/0257-8972(91)90088-e

Abstract

Keywords

• PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION
• DEPOSITION MODELING