Aberration correction in a low voltage SEM by a multipole corrector
- 1 September 1995
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
- Vol. 363 (1-2) , 316-325
- https://doi.org/10.1016/0168-9002(95)00056-9
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- ber einige Fehler von ElektronenlinsenThe European Physical Journal A, 1936