Chemical vapor deposition of zirconia film using zirconium alkoxide compound.
- 1 January 1990
- journal article
- Published by Society of Chemical Engineers, Japan in KAGAKU KOGAKU RONBUNSHU
- Vol. 16 (3) , 494-497
- https://doi.org/10.1252/kakoronbunshu.16.494
Abstract
No abstract availableThis publication has 0 references indexed in Scilit: