Abstract
This contribution surveys the design, synthesis, characterization, and implementation of volatile metal-organic coordination complexes for the MOCVD (metal-organic chemical vapor deposition) growth of thin films of high temperature superconductors, lattice-matched dielectrics, and electro-optic materials. The central focus is on fluorinated and fluorine-free P-diketonate and P-ketoiminate complexes. Target materials include the YBCO (YBa2Cu307-6), BSCCO (Bi2Sr2Can- 1Cun05+(2n- 1)+6) and TBCCO (T12Ba2Can-lCun05+(2n-1)+6) superconducting phases as well as YAlO3, NdGa03, PrGaO3, BaPbO3, BaTi03, and Sr2MTaOg.

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