A new technique for measuring sputtering yields at high energies
- 1 January 1984
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 1 (1) , 118-122
- https://doi.org/10.1016/0168-583x(84)90483-x
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Sputtering of silicon and its compounds in the electronic stopping regionRadiation Effects, 1983
- Sputtering of Al2O3 and LiNbO3 in the electronic stopping regionRadiation Effects, 1982
- Surface sticking probabilities for sputtered atoms of93Nb and103RhRadiation Effects, 1980
- Energy dependence of the trapping of uranium atoms by aluminum oxide surfacesRadiation Effects, 1980