Radiation hardening of thin films during vacuum deposition
- 1 July 1968
- journal article
- Published by Springer Nature in The Science of Nature
- Vol. 55 (7) , 340
- https://doi.org/10.1007/bf00600453
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Ion energy spread of a universal high current ion source for ions from solidsNuclear Instruments and Methods, 1968
- Strong Ion Source for Ions from SolidsReview of Scientific Instruments, 1966