Kinetics of complex defect annealing in silicon

• 27 February 1967
• journal article
• Published by Elsevier in Physics Letters A
• Vol. 24  (5) , 251-252
• https://doi.org/10.1016/0375-9601(67)90418-5

Abstract

Keywords

• KINETICS OF COMPLEX
• COMPLEX DEFECT ANNEALING
• ANNEALING IN SILICON