Aluminum/nickel silicide contacts on silicon
- 1 September 1978
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 53 (2) , 135-140
- https://doi.org/10.1016/0040-6090(78)90026-3
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Study of Al/Pd2Si contacts on SiJournal of Vacuum Science and Technology, 1977
- Evolution and Current Status of Aluminum MetallizationJournal of the Electrochemical Society, 1976
- Structure and growth kinetics of Ni2Si on siliconThin Solid Films, 1975
- Electrical and mechanical features of the platinum silicide-aluminum reactionJournal of Applied Physics, 1973
- Formation of NiSi and current transport across the NiSi-Si interfaceSolid-State Electronics, 1971