Biaxial elastic modulus of metallic films determined from vibrating circular membranes

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Abstract
The biaxial moduli of free-standing metallic films have been determined from their behavior as elastically tensioned membranes. Errors due to thickness determination and warping of the films are eliminated, thereby opening up the possibility of solving a number of controversial issues. The method combines the determination of stress from the frequency of the membrane modes with optical measurements of strain. Tests on Ta and Ni films yield values of the biaxial modulus in good agreement with calculated literature data.