Correlation between structural and electrical profiles in ion-implanted GaAs

Publisher Website

1 January 1980

journal article
Published by Taylor & Francis in Radiation Effects

Vol. 49 (1-3) , 183-186
https://doi.org/10.1080/00337578008243091

Abstract

No abstract available

Keywords

This publication has 3 references indexed in Scilit:

TEM structural studies on Se⁺implanted GaAs
Radiation Effects, 1979
Structural and electrical profiles for double damage layers in ion-implanted silicon
Electronics Letters, 1977
The observation of dissociated dislocations in silicon
Philosophical Magazine, 1970