A Gas Analyzer for Trace Impurity Analysis
- 1 May 1972
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 9 (3) , 1084-1089
- https://doi.org/10.1116/1.1316995
Abstract
A commercial residual gas analyzer has been modified by the addition of a directed gas jet to enable impurity concentrations to be measured in the low parts per million range. Particular attention has been paid to the abundance of N2 in Ne and Ar. The errors in the abundance measurements are estimated to be less than 0.2 ppm at 0.2 ppm of N2 in Ne and 0.6 ppm at 5 ppm of N2 in Ar. The choice of operating parameters, sources of error and advantages of this type of analyzer are discussed.Keywords
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