Ultrasonic experiments with lead zirconate titanate thin films fabricated by sol gel processing
- 2 March 1989
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 25 (5) , 307-309
- https://doi.org/10.1049/el:19890214
Abstract
Surface and bulk acoustic wave measurements with lead zirconate titanate (PZT) thin films fabricated by a sol gel processing technique are reported for the first time. The piezoelectricity of such films was achieved by poling. Good acoustic properties of these films are confirmed by the acoustic images and V(z) curves obtained by a scanning acoustic microscope.Keywords
This publication has 1 reference indexed in Scilit:
- Surface acoustic wave propagation on lead zirconate titanate thin filmsApplied Physics Letters, 1988