Mass Transfer, Equilibrium, and Kinetics in the Chemical Vapor Deposition of Boron from Impinging Jets
- 1 December 1977
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 124 (12) , 1931-1937
- https://doi.org/10.1149/1.2133199
Abstract
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