Microfabrication of phase shifting zone plates for hard x-rays
- 30 April 1993
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 21 (1-4) , 99-102
- https://doi.org/10.1016/0167-9317(93)90036-5
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Contrast amplification of very high resolution x-ray masksJournal of Vacuum Science & Technology B, 1990
- Phase zone plates for x rays and the extreme uvJournal of the Optical Society of America, 1974