Swing-arm profilometry of aspherics
- 8 September 1995
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- Vol. 2536, 169-179
- https://doi.org/10.1117/12.218421
Abstract
A profilometer is described that utilizes the swing-arm geometry to provide surface profile measurements of large, highly aspheric surfaces. The profilometer measurement is shown to be robust against stiffness and alignment induced errors in the probe motion.Keywords
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