Effect of mixing oxygen or diborane on the formation of amorphous carbon films from methane by r.f. plasma chemical vapour deposition
- 1 September 1988
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 163, 229-232
- https://doi.org/10.1016/0040-6090(88)90427-0
Abstract
No abstract availableKeywords
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