Ion beam oxidation of Nb-based Josephson junctions
- 23 October 1980
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 16 (22) , 850-851
- https://doi.org/10.1049/el:19800604
Abstract
Ion beam oxidation and structuring of Nb-based planar Josephson junctions are briefly described and preliminary results are presented.Keywords
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