The equipment for and process of metal ion beam enhanced deposition
- 31 August 1994
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 66 (1-3) , 350-354
- https://doi.org/10.1016/0257-8972(94)90028-0
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Reactive and nonreactive ion mixing of Ni films on carbon substratesJournal of Vacuum Science & Technology A, 1988