Measurement of the Effect of Temperature on Stress Distribution and Deformation in Multilayer Optical Thin Film Structures
- 1 January 1994
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Molecular Dynamics Study of Ion Impact Phenomena and Compressive Stress in Thin FilmsMRS Proceedings, 1993
- An Approximate Analysis of Stresses in Multilayered Elastic Thin FilmsJournal of Applied Mechanics, 1988
- Elastic relationships in layered composite media with approximation for the case of thin films on a thick substrateJournal of Applied Physics, 1987
- Creep curve of silicon wafersApplied Physics Letters, 1977
- Introduction to CeramicsJournal of the Electrochemical Society, 1977
- Thermal expansion of some diamondlike crystalsJournal of Applied Physics, 1975