Sol-Gel-Derived Mesoporous Silica Films with Low Dielectric Constants

• 1 November 2000
• journal article
• research article
• Published by Wiley in Advanced Materials
• Vol. 12  (22) , 1695-1698
• https://doi.org/10.1002/1521-4095(200011)12:22<1695::aid-adma1695>3.0.co;2-v

Abstract

Keywords

• LOW DIELECTRIC CONSTANT MATERIALS
• MESOPOROUS SILICA
• SILICA FILMS
• MESOPOROUS
• SOL-GEL PROCESSING